TEL Tokyo Electron 5087-404467-12 Scope Assembly 5004-300016-11 Lithius Working Part No: SGDA-A5AP

Part No: SGDA-A5AP

Part No: 3D80-002184-V1

Inventory # K-6802

img{max-width:100%} Philips 9415 012 61315 Power Supply PCB Card ASML 4022

TEL Tokyo Electron 5087-404467-12 Scope Assembly 5004-300016-11 Lithius Working Part No: SGDA-A5APTEL Tokyo Electron 5087 404467 12 Scope Assembly 5004 300016 11 Lithius Working Inventory # A 18743 Part No: 5087 404467 12 Model No: SCOPE ASSY COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, parts may vary) Assembly Part No: 5087 404467 12, SCOPE ASSY 5004 300016 11 BATH,RRC (509510024911 1 5010 311958 11 COVER,BATH 1 5010 409215 11 PLATE 2 5010 311833 11 BLOCK 2 5010 409130 11 SUPPORT