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Part No: VIP-C616
0120-00273
img{max-width:100%} SVG Silicon Valley Group 859-0808-008 Processor PCB Card Rev
Daughterboard Part No: 810-707150-001
TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Part No: VIP-C616TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Model No: Left Right DEV Scan Arm Assembly DEV Develop Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, parts may vary) Assembly Part No: 5087 400475 16, ARM(L) ASSY 5010 302038 11 BASE,SCAN 1 5010 304964 11 BASE 1 2910 414906 12 BLOCK,BELT 1 5010 400223 11 CLAMP,BELT 1 5010 401999 11 SENSOR SHUTTER 1 5010 304965 11
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