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2) This Lam Research 853-017620-001-A-C222 Tri-Convectron Interface Assembly is used working surplus
It was removed from a KLA AIT I wafer inspection tool
Part No: 3270171G
Removed from a KLA Instruments 2138 200mm Wafer Surface Defect Inspection System
Horiba STEC SEC-Z714AGX Mass Flow Controller MFC Z700 Reseller Lot of 12 Working 2) This Lam Research 853-017620-001-A-C222Horiba STEC SEC Z714AGX Mass Flow Controller MFC Z700 Reseller Lot of 12 Working Part No: SEC Z714AGX Model No: Z700 Interface: DeviceNet Fitting: Surface Mount May Require Calibration CE Marked Reseller Lot of 12 Made in Japan Included Components Part No: 0190 41113; H2, 5000 SCCM (Qty. 2) Part No: 0190 41113: N2, 10000 SCCM (Qty. 4) Part No: 0190 41112; Cl2, 300 SCCM (Qty. 2) Part No: 0190 41114; PH3, 2000 SCCM Part No: 0190 41114; Si2H6, 500 SCCM
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