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Electrical Diagram No: 4S066-591-2
Part No: Y5304400
Semco Part No: N863349
Focus Eprom 1: 03-20-01760
TEL Tokyo Electron 1B80-002389-11 DN Board 1B80-002393-12 PR300Z Used Working Electrical Diagram No: 4S066-591-2TEL Tokyo Electron 1B80 002389 11 DN Board 1B80 002393 12 PR300Z Used Working Inventory # A 8646, AA 5457 This TEL Tokyo Electron 1B80 002389 11 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a TEL Tokyo Electron PR300Z Carrierless BEOL Cleaning System. Specifications Part No: 1B80 002389 11 Model No: DI80DO80 TSB2500, AP9E 1429A Daughterboard Part No: 1B80 002393 12, CMC ADD ON
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