TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork C A-2000LL Used Working

C A-2000LL Used Working

LF RF GENERATOR This Novellus Systems 03-00290-03 LF RF Generator Cable is used working surplus

Inventory # A-10142

Inventory # 16262

TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork C A-2000LL Used WorkingTEL Tokyo Electron 51161 802 001 Interface Block Robot IRAM Lithius w 300mm Fork Part No: 51161 802 001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M SSB020FN502 NSK Linear Stage Slide Part No: XY HRS025ZRS202 Parts List Assembly Part No: 5087 403668 12, IRAM (LITHIUS IPL), X AXIS 5080 192746 11: BASE,FORK IRAM XY P5179