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Part No: 0020-54078
The unit has a slightly bent mounting panel and minor scuffs to the body (see photos)
Made in Japan This Hitachi CWS850/2 I/O Communication PCB Card CWS85 I-900SRT is used working surplus
Made in the USA This OEM-650A is working surplus
TEL Tokyo Electron COT Coat Process Assembly 5087-404467-12 Lithius Working Part No: 0020-54078TEL Tokyo Electron COT Coat Process Assembly 5087 404467 12 Lithius Working Part No: COT Coat Process Assembly COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System Parts List (approximations, some parts may vary) Assembly Part No: 5087 404467 12 SCOPE ASSY 5004 300016 11 BATH,RRC (509510024911 5010 311958 11 COVER,BATH 5010 409215 11 PLATE (Qty. 2) 5010 311833 11 BLOCK (Qty. 2) 5010 409130 11 SUPPORT (Qty. 2)
