Tylan FC-2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used Removed from a Hitachi M-511E

Removed from a Hitachi M-511E Microwave Plasma Etching System Installed Power Supply

Part No: VDJB0013203

5080-193519-11 FAN UNIT TK001-01-N04-0 3

Model No: Fan Motor Assembly Installed Motor

Tylan FC-2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used Removed from a Hitachi M-511ETylan FC 2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used Inventory # A 14119 This Tylan FC 2979MEP5 MFC Mass Flow Controller is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: FC 2979MEP5 Model No: 2979 Series Range Gas: 200 SCCM, SF6 Interface: 9 Pin D Connector: Surface Mount CE Marked May Require Calibration Removed from a TEL Tokyo Electron U2 855DD